Cleatech Wafer Storage Desiccator Cabinet, Eight Chambers , Static-Dissipative PVC, 300mm Wafer
  • Wafer Desiccator Cabinet, Eight Chambers , 38x25x64, ESD PVC, 300mm Wafer-1510-8-R

Wafer Desiccator Cabinet, Eight Chambers , 38x25x64, ESD PVC, 300mm Wafer-1510-8-R

$8,280.00

Savings: $1,656.00

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SKU: 1510-8-R

Description

Wafer Desiccator Cabinet, Eight Chambers , 38x25x64, ESD PVC, 300mm Wafer

Cleatech? Wafer Storage Desiccator Cabinet provides storage of up to 8″ silicon wafer carriers in a particle-free nitrogen environment. Designed for optimal storage density of 200mm wafers. Theses wafer desiccator cabinets are also available in Desiccant type providing isolated atmosphere chambers without having back plenum and gas ports. Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%. Wafer Capacity : 200 mm Based on Wafer Containers 12″W x 11″D x 10″ H or smaller . Acrylic gets damaged by alcohol and other cleaning agents

Standard Features

  • 1/4″ thickness clear Acrylic
  • Preserves moisture-sensitive wafers in a dry, dust-free environment
  • Designed specifically for standard lot boxes, carriers used for 200mm and 300mm wafers.
  • Stainless Steel door hinge for maximum door support
  • Chrome Plated Lift-and-turn Compression Latch for perfect door Seals
  • Rubber Bulb, Vinyl one-piece door sealing
  • Removable Plenum chamber minimizes backfill ensures uniform gas distribution
  • 304 stainless steel door frame extend service lifetime and improve sealing performance
  • Grounded rack , hinge and door latch provide additional ESD safety
  • Wafer Capacity : 200mm

Additional information

Weight130 lbs
Dimensions30 × 32 × 57 in
Application

Wafer Storage

No. Of Chambers

8

Shelf Space (Usable Area) W"xD"

17.4×27

Overall Dimension (W" x D" x H")

38x29x64

Material

Static-Dissipative PVC

Chamber Clearance

17 7/16W" x 27D" x 14 1/2H"

Storage Capacity

16

  • Heavy-duty Powder coated steel stand
  • Lockable casters for large capacity desiccator cabinets enhanced mobility
  • Gas-in Port and Adjustable Auto pressure relief valve relives excess nitrogen (N2)
  • An Automatic nitrogen purge control unit provides automatic low-humidity control capable of measuring and displaying humidity inside the Desiccator cabinet in the range: 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH).
  • While inside humidity level is below set point the system provides low purge (2-20 Cubic feet per hour). Maintain positive pressure inside the desiccator chambers to have free contaminants and moisture environment.
  • When the moisture climbs above an adjustable set point the system automatically activates high-flow purge (0.5 – 60 PSI).
  • In One-channel purge control unit, there is only one humidity sensor which is installed in the lower chamber of multi-chamber desiccators. There are some perforated holes between chambers which connect the chambers together.
  • For more critical requirements, select the Multi-Channel nitrogen purge control unit. For each chamber there is separated sensor and controller. When any door opens the system responses much faster to the sudden RH% increase.

Minimum system includes:

  • Digital Humidity monitor to display and set the humidity level.
  • Dual Scale 0-60 PSI/400 Kpa Gauge indicating regulated input pressure
  • 0.5 – 60 PSI Pressure Regulator for control of high purge flow
  • 2-20 SCFH Flowmeter allows control of minimum maintaining flow
  • External Humidity Sensor accurately measures relative humidity (+/-2%RH) and

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