Wafer Desiccator Cabinet, Ten Chambers,53x25x60, Acrylic, 200mm Wafer

Name: Wafer Desiccator Cabinet, Ten Chambers,53x25x60, Acrylic, 200mm Wafer
SKU: 1510-10-K
Price: 6460.00 USD
Availability: InStock

$6,460.00

Savings: $1,292.00

Inert-Gas Options Gas Accessories

RH% & O2 Control

rh & temperature monitor

o2 monitor

shelf

stainless steel bottom plate

door lock

stand

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SKU: 1510-10-K

Wafer Desiccator Cabinet, Ten Chambers,53x25x60, Acrylic, 200mm Wafer

Cleatech Wafer Storage Desiccator Cabinet provides storage of up to 8″ silicon wafer carriers in a particle-free nitrogen environment. Designed for optimal storage density of 200mm wafers. Theses wafer desiccator cabinets are also available in Desiccant type providing isolated atmosphere chambers without having back plenum and gas ports. Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%. Wafer Capacity : 200 mm Based on Wafer Containers 12″W x 11″D x 10″ H or smaller . Acrylic gets damaged by alcohol and other cleaning agents

Standard Features

1/4″ thickness clear Acrylic
Preserves moisture-sensitive wafers in a dry, dust-free environment
Designed specifically for standard lot boxes, carriers used for 200mm and 300mm wafers.
Stainless Steel door hinge for maximum door support
Chrome Plated Lift-and-turn Compression Latch for perfect door Seals
Rubber Bulb, Vinyl one-piece door sealing
Removable Plenum chamber minimizes backfill ensures uniform gas distribution
304 stainless steel door frame extend service lifetime and improve sealing performance
Grounded rack , hinge and door latch provide additional ESD safety
Wafer Capacity : 200mm

Weight	130 lbs
Dimensions	30 × 32 × 57 in
Application	Wafer Storage
No. Of Chambers	10
Shelf Space (Usable Area) W"xD"	25×23
Overall Dimension (W" x D" x H")	53x25x60
Material	Clear Acrylic
Chamber Clearance	25W" x 23D" x 10 13/16H"
Storage Capacity	40
Brand	Cleatech

Heavy-duty Powder coated steel stand
Lockable casters for large capacity desiccator cabinets enhanced mobility
Gas-in Port and Adjustable Auto pressure relief valve relives excess nitrogen (N2)
An Automatic nitrogen purge control unit provides automatic low-humidity control capable of measuring and displaying humidity inside the Desiccator cabinet in the range: 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH).
While inside humidity level is below set point the system provides low purge (2-20 Cubic feet per hour). Maintain positive pressure inside the desiccator chambers to have free contaminants and moisture environment.
When the moisture climbs above an adjustable set point the system automatically activates high-flow purge (0.5 – 60 PSI).
In One-channel purge control unit, there is only one humidity sensor which is installed in the lower chamber of multi-chamber desiccators. There are some perforated holes between chambers which connect the chambers together.
For more critical requirements, select the Multi-Channel nitrogen purge control unit. For each chamber there is separated sensor and controller. When any door opens the system responses much faster to the sudden RH% increase.

Minimum system includes:

Digital Humidity monitor to display and set the humidity level.
Dual Scale 0-60 PSI/400 Kpa Gauge indicating regulated input pressure
0.5 – 60 PSI Pressure Regulator for control of high purge flow
2-20 SCFH Flowmeter allows control of minimum maintaining flow
External Humidity Sensor accurately measures relative humidity (+/-2%RH) and

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Wafer Desiccator Cabinet, Ten Chambers,53x25x60, Acrylic, 200mm Wafer

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