Wafer Storage Desiccator Cabinets

Cleatech’s Wafer Storage Desiccator Cabinet provides storage of up to 12″ silicon wafer carriers in a particle-free nitrogen environment. Designed for optimal storage density of 200mm or 300mm wafers. Theses wafer desiccator cabinets are also available in Desiccant type providing isolated atmosphere chambers without having back plenum and gas ports. Choose the optional Automatic nitrogen-purge control unit and humidity sensor which are capable of measuring and displaying humidities in the range 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH) and Reduces Nitrogen Consumption to 75%.

Standard Features

• 1/4″ thickness clear Acrylic or Static-Dissipative PVC
• Preserves moisture-sensitive wafers in a dry, dust-free environment
• Designed specifically for standard lot boxes, carriers used for 200mm and 300mm wafers.
• Stainless Steel door hinge for maximum door support
• Chrome Plated Lift-and-turn Compression Latch for perfect door Seals
• Rubber Bulb, Vinyl one-piece door sealing
• Removable Plenum chamber minimizes backfill ensures uniform gas distribution
• 304 stainless steel door frame extend service lifetime and improve sealing performance
• Grounded rack , hinge and door latch provide additional ESD safety

Standard Options

• Heavy-duty Powder coated steel stand
• Lockable casters for large capacity desiccator cabinets enhanced mobility
• Gas-in Port and Adjustable Auto pressure relief valve relives excess nitrogen (N2)
• An Automatic nitrogen purge control unit provides automatic low-humidity control capable of measuring and displaying humidity inside the Desiccator cabinet in the range: 5-100%RH, Accurately Controls Pre-Set Relative Humidity (+/- 2% RH).